JPS62184483U - - Google Patents
Info
- Publication number
- JPS62184483U JPS62184483U JP7178586U JP7178586U JPS62184483U JP S62184483 U JPS62184483 U JP S62184483U JP 7178586 U JP7178586 U JP 7178586U JP 7178586 U JP7178586 U JP 7178586U JP S62184483 U JPS62184483 U JP S62184483U
- Authority
- JP
- Japan
- Prior art keywords
- metal case
- electron beam
- opening
- semiconductor detector
- absorbing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7178586U JPS62184483U (en]) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7178586U JPS62184483U (en]) | 1986-05-13 | 1986-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184483U true JPS62184483U (en]) | 1987-11-24 |
Family
ID=30914655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7178586U Pending JPS62184483U (en]) | 1986-05-13 | 1986-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184483U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5551338A (en) * | 1978-08-21 | 1980-04-15 | Technicon Instr | Method and device for measuring concentration of constituent in sample |
-
1986
- 1986-05-13 JP JP7178586U patent/JPS62184483U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5551338A (en) * | 1978-08-21 | 1980-04-15 | Technicon Instr | Method and device for measuring concentration of constituent in sample |